Measurement Technology for Micro-Nanometer Devices
Wendong Zhang, Tielin Shi, Zongmin Ma, et al.
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128,99 €
Naturwissenschaften, Medizin, Informatik, Technik / Elektronik, Elektrotechnik, Nachrichtentechnik
Beschreibung
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale * Highlights the advanced research work from industry and academia in micro-nano devices test technology * Written at both introductory and advanced levels, provides the fundamentals and theories * Focuses on the measurement techniques for characterizing MEMS/NEMS devices
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Schlagwörter
Mikroelektronik, Optische u. Nichtlineare Optische Materialien, Optical and Non-Linear Optical Materials, MEMS, Materials Science, Materialwissenschaften, Maschinenbau, Control Process & Measurements, Mechanical Engineering, Electrical & Electronics Engineering, Elektrotechnik u. Elektronik, Mess- u. Regeltechnik, Nanoelektronik