Photomask Fabrication Technology
Benjamin G. Eynon, Banqiu Wu
PDF
ca. 201,01 €
Naturwissenschaften, Medizin, Informatik, Technik / Wärme-, Energie- und Kraftwerktechnik
Beschreibung
Photomasks, the printing masters for the fabrication of integrated circuits, have become a necessity of modern semiconductor manufacturing. This book details the science and technology of industrial photo mask production, including fundamental principles, industrial production flows, and technological evolution.
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